Important Questions
Prepared by
Santhosh (Admin )
Whatsapp link 👉🏾Join me on WhatsApp
InStAgRaM👉🏾
Whatsapp link 👉🏾Join me on WhatsApp
InStAgRaM👉🏾
Unit 1
1.silicon based MEMS Processor
2.stress and strain analysis(problems also), flexural beam bending ,torsional deflection.
Unit 2
1.thermal couples(ink jet printer too),thermal autuator
2.magnetic actuators- micromagnetic components
3.parallel plate capacitors
Unit 33.parallel plate capacitors
1. Stress on flexual centilevers
2.piezoelectric effects- piezoelectric materials- application to inertia pressure, tactile and flow sensors
Unit 4
1.LIGA process
2.Plasma etching,wet ethching
3.DRIE (rare)
Unit 5 3.DRIE (rare)
1.optical MEMS and its apps
2.PDMS- PMMA- parylene fluorocarbon
DOnt comment on post below for important questions updates better message us on instagram or whatsapp for instant updates
For more details, Important questions for other subjects join us through WhatsApp
Above link is made to connect Admin with viewer's for better improvements and feedback
Above link is made to connect Admin with viewer's for better improvements and feedback
Share it as link alone .
This is my own preparation for you engineers .
Don't share it as screenshot and waste my hard work .
If u found this anywhere kindly report me #Admin :+6587090802 or whatsapp me
*These questions are expected for the exams This may or may not be asked for exams .
All the best....
Thanks for your love and support guys keep supporting and share let the Engineers know about Us and leave a comment on WhatsApp and Instagram for better improvements
SYLLABUS
UNIT-1: INTRODUCTION
Intrinsic characteristics of MEMS- Energy domains and transducers- sensors and actuators- Introduction to micro fabrication- silicon based MEMS Processor- new materials- review of Electrical and mechanical concepts in MEMS- Semiconductor devices- stress and strain analysis- flexural beam bending - torsional deflection.
UNIT-2: SENSORS AND ACTUATOR-1
Electrostatic sensors - parallel plate capacitors- Application- Interdigitated Finger capacitor-Comb drive devices- micro grippers- micro motors- thermal sensing and actuation- thermal expansion- thermal couples- thermal resistors- thermal bimorph- applications- magnetic actuators- micromagnetic components- case studies of mems in magnetic actuators- actuation using shape memory alloys.
UNIT-3: SENSORS AND ACTUATORS- 2
piezoresistive sensors- piezoresistive sensor materials- stress analysis of mechanical elements- application of Inertia, pressure, tactile and flow sensors - piezoelectric sensors and actuators- piezoelectric effects- piezoelectric materials- application to inertia , acoustics, tactile and flow sensors
UNIT-4: Micromachining
Silicon anisotropic etching- anisotropic wet etching- dry etching of silicon- plasma etching- deep reaction ion etching (DRIE)- Isotropic wet etching- gas phase etchants- case studies- basic surface micro machining process- structural and sacrificial materials- acceleration of sacrificial etch- striction and antistriction methods- LIGA process - assembly of 3D MEMS- foundry process.
UNIT-5: POLYMER AND OPTICAL MEMS
polymers in MEMS- polimide - (SU-8)- liquid crystal polymer (LCP)- PDMS- PMMA- parylene fluorocarbon - application to acceleration, pressure, flow and tactile sensors- optical MEMS-
